Microfabrication of new sensors for scanning probe microscopy
Wilfried Noell; Michael Abraham; W Ehrfeld; Manfred Lacher; Karsten Mayr; Wilfried Noell; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany; Michael Abraham; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany; W Ehrfeld; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany; Manfred Lacher; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany; Karsten Mayr; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany
Журнал:
Journal of Micromechanics and Microengineering
Дата:
1998-06-01
Аннотация:
The paper presents a new concept of a micromachined integrated sensor for combined atomic force/near-field optical microscopy. The sensor consists of a microfabricated cantilever with an integrated waveguide and a transparent near-field aperture tip. The fabrication process involves a novel method for the micromachining of optical near-field tips with an aperture diameter of 100 to 200 nm. A simple concept is introduced for the effective light coupling from the cantilever into the tip.
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