| Автор | Wilfried Noell |
| Автор | Michael Abraham |
| Автор | W Ehrfeld |
| Автор | Manfred Lacher |
| Автор | Karsten Mayr |
| Дата выпуска | 1998-06-01 |
| dc.description | The paper presents a new concept of a micromachined integrated sensor for combined atomic force/near-field optical microscopy. The sensor consists of a microfabricated cantilever with an integrated waveguide and a transparent near-field aperture tip. The fabrication process involves a novel method for the micromachining of optical near-field tips with an aperture diameter of 100 to 200 nm. A simple concept is introduced for the effective light coupling from the cantilever into the tip. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Microfabrication of new sensors for scanning probe microscopy |
| Тип | paper |
| DOI | 10.1088/0960-1317/8/2/017 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 8 |
| Первая страница | 111 |
| Последняя страница | 113 |
| Аффилиация | Wilfried Noell; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany |
| Аффилиация | Michael Abraham; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany |
| Аффилиация | W Ehrfeld; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany |
| Аффилиация | Manfred Lacher; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany |
| Аффилиация | Karsten Mayr; Institute of Microtechnology Mainz, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany |
| Выпуск | 2 |
