A large-force fluidic device micromachined in silicon
Changho Cho; Jongpal Kim; Dong-il Dan Cho; Changho Cho; School of Electrical Engineering, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea; Jongpal Kim; School of Electrical Engineering, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea; Dong-il Dan Cho; School of Electrical Engineering, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea
Журнал:
Journal of Micromechanics and Microengineering
Дата:
1998-09-01
Аннотация:
This paper presents a silicon-micromachined fluidic thruster device, capable of a large output force. The output force is controlled by a vortex generated inside the device chamber. The vortex-controlled microthrusters are fabricated on a 500 m thick silicon wafer. This is the first time such a device has been micromachined in silicon. The vortex chamber and inlet ports are deep reactive ion etched to a depth of 300 m from the topside, and the output nozzle is deep reactive ion etched from the backside to a depth of 200 m. The topside is sealed by anodically bonding with a glass wafer. For a vortex chamber radius of 500 m and control port width of 50 m, the effects of varying supply port and output nozzle sizes are experimentally evaluated. A microthruster with a 500 m supply port width and 120 m output nozzle radius is capable of a 66.4 mN net thrust force with a pressure of 600 kPa. This represents a very large force, considering the fact that the thruster volume is less than 1 .
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