| Автор | Changho Cho |
| Автор | Jongpal Kim |
| Автор | Dong-il Dan Cho |
| Дата выпуска | 1998-09-01 |
| dc.description | This paper presents a silicon-micromachined fluidic thruster device, capable of a large output force. The output force is controlled by a vortex generated inside the device chamber. The vortex-controlled microthrusters are fabricated on a 500 m thick silicon wafer. This is the first time such a device has been micromachined in silicon. The vortex chamber and inlet ports are deep reactive ion etched to a depth of 300 m from the topside, and the output nozzle is deep reactive ion etched from the backside to a depth of 200 m. The topside is sealed by anodically bonding with a glass wafer. For a vortex chamber radius of 500 m and control port width of 50 m, the effects of varying supply port and output nozzle sizes are experimentally evaluated. A microthruster with a 500 m supply port width and 120 m output nozzle radius is capable of a 66.4 mN net thrust force with a pressure of 600 kPa. This represents a very large force, considering the fact that the thruster volume is less than 1 . |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | A large-force fluidic device micromachined in silicon |
| Тип | paper |
| DOI | 10.1088/0960-1317/8/3/004 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 8 |
| Первая страница | 195 |
| Последняя страница | 199 |
| Аффилиация | Changho Cho; School of Electrical Engineering, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea |
| Аффилиация | Jongpal Kim; School of Electrical Engineering, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea |
| Аффилиация | Dong-il Dan Cho; School of Electrical Engineering, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea |
| Выпуск | 3 |
