A MBE on-line optical modulation photoreflectance analysis system
He Yuan-jin; Dong Yue-mei; Duan Xiao-dong; He Yuan-jin; Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China; Dong Yue-mei; Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China; Duan Xiao-dong; Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China
Журнал:
Acta Physica Sinica (Overseas Edition)
Дата:
1994-08-01
Аннотация:
An on-line optical modulation photoreflectance (PR) spectroscopy analysis system associated with the molecular beam epitaxy (MBE) system has been designed and established. This paper reports in detail the optical design, the experimental arrangement, and the adjustment of the system. GaAs film samples grown by MBE on Si-substrate have been measured with this on-line system. The results show that the on-line PR spectroscopy can characterize the quality of the as-grown film samples qualitatively and promptly.
341.9Кб