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Автор He Yuan-jin
Автор Dong Yue-mei
Автор Duan Xiao-dong
Дата выпуска 1994-08-01
dc.description An on-line optical modulation photoreflectance (PR) spectroscopy analysis system associated with the molecular beam epitaxy (MBE) system has been designed and established. This paper reports in detail the optical design, the experimental arrangement, and the adjustment of the system. GaAs film samples grown by MBE on Si-substrate have been measured with this on-line system. The results show that the on-line PR spectroscopy can characterize the quality of the as-grown film samples qualitatively and promptly.
Формат application.pdf
Издатель Institute of Physics Publishing
Название A MBE on-line optical modulation photoreflectance analysis system
Тип paper
DOI 10.1088/1004-423X/3/8/008
Print ISSN 1004-423X
Журнал Acta Physica Sinica (Overseas Edition)
Том 3
Первая страница 617
Последняя страница 622
Аффилиация He Yuan-jin; Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China
Аффилиация Dong Yue-mei; Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China
Аффилиация Duan Xiao-dong; Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China
Выпуск 8

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