Автор |
He Yuan-jin |
Автор |
Dong Yue-mei |
Автор |
Duan Xiao-dong |
Дата выпуска |
1994-08-01 |
dc.description |
An on-line optical modulation photoreflectance (PR) spectroscopy analysis system associated with the molecular beam epitaxy (MBE) system has been designed and established. This paper reports in detail the optical design, the experimental arrangement, and the adjustment of the system. GaAs film samples grown by MBE on Si-substrate have been measured with this on-line system. The results show that the on-line PR spectroscopy can characterize the quality of the as-grown film samples qualitatively and promptly. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
A MBE on-line optical modulation photoreflectance analysis system |
Тип |
paper |
DOI |
10.1088/1004-423X/3/8/008 |
Print ISSN |
1004-423X |
Журнал |
Acta Physica Sinica (Overseas Edition) |
Том |
3 |
Первая страница |
617 |
Последняя страница |
622 |
Аффилиация |
He Yuan-jin; Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China |
Аффилиация |
Dong Yue-mei; Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China |
Аффилиация |
Duan Xiao-dong; Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China |
Выпуск |
8 |