Optimal detection in scanning electron microscopy
A M J Huiser; P van Toorn; A M J Huiser; Lab. de Phys. Theorique, Ecole Polytech. Federale Lausanne, Lausanne, Switzerland; P van Toorn; Lab. de Phys. Theorique, Ecole Polytech. Federale Lausanne, Lausanne, Switzerland
Журнал:
Journal of Physics D: Applied Physics
Дата:
1982-05-14
Аннотация:
Considers the question of whether it is possible to enhance the imaging properties of a STEM by using other than conventional detector configurations. A method is described to compute the optimal detector configuration for the object one wishes to image, given the aberrations of the microscope. For several cases numerical computations have been performed. The optimal configurations are compared with conventional configurations.
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