| Автор | A M J Huiser |
| Автор | P van Toorn |
| Дата выпуска | 1982-05-14 |
| dc.description | Considers the question of whether it is possible to enhance the imaging properties of a STEM by using other than conventional detector configurations. A method is described to compute the optimal detector configuration for the object one wishes to image, given the aberrations of the microscope. For several cases numerical computations have been performed. The optimal configurations are compared with conventional configurations. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Optimal detection in scanning electron microscopy |
| Тип | paper |
| DOI | 10.1088/0022-3727/15/5/005 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 15 |
| Первая страница | 747 |
| Последняя страница | 755 |
| Аффилиация | A M J Huiser; Lab. de Phys. Theorique, Ecole Polytech. Federale Lausanne, Lausanne, Switzerland |
| Аффилиация | P van Toorn; Lab. de Phys. Theorique, Ecole Polytech. Federale Lausanne, Lausanne, Switzerland |
| Выпуск | 5 |
