Burst-mode sputtering in a flowing gas
E C Harvey; R C Tobin; E C Harvey; Dept. of Phys., Monash Univ., Clayton, Vic., Australia; R C Tobin; Dept. of Phys., Monash Univ., Clayton, Vic., Australia
Журнал:
Journal of Physics D: Applied Physics
Дата:
1988-10-14
Аннотация:
A pulsed glow discharge is used for sputtering in the presence of a gas flow to form a metal vapour jet suitable for use in a room-temperature metal vapour laser. It is found that the sputtering process is most efficient during the first 50 mu s of the discharge pulse. Switching the discharge in the burst mode with a pulse duration of about 15 mu s and an interpulse delay of about 18 mu s achieves similar metal vapour concentrations in the jet to that attained by steady-pulse sputtering, but requires only half the total discharge energy.
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