| Автор | E C Harvey |
| Автор | R C Tobin |
| Дата выпуска | 1988-10-14 |
| dc.description | A pulsed glow discharge is used for sputtering in the presence of a gas flow to form a metal vapour jet suitable for use in a room-temperature metal vapour laser. It is found that the sputtering process is most efficient during the first 50 mu s of the discharge pulse. Switching the discharge in the burst mode with a pulse duration of about 15 mu s and an interpulse delay of about 18 mu s achieves similar metal vapour concentrations in the jet to that attained by steady-pulse sputtering, but requires only half the total discharge energy. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Burst-mode sputtering in a flowing gas |
| Тип | paper |
| DOI | 10.1088/0022-3727/21/10/003 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 21 |
| Первая страница | 1486 |
| Последняя страница | 1489 |
| Аффилиация | E C Harvey; Dept. of Phys., Monash Univ., Clayton, Vic., Australia |
| Аффилиация | R C Tobin; Dept. of Phys., Monash Univ., Clayton, Vic., Australia |
| Выпуск | 10 |
