A dynamical theory of extremely asymmetric X-ray diffraction taking account of normal lattice strain
S Stepanov; R Kohler; S Stepanov; MPG-AG Rontgenbeugung, Berlin, Germany; R Kohler; MPG-AG Rontgenbeugung, Berlin, Germany
Журнал:
Journal of Physics D: Applied Physics
Дата:
1994-09-14
Аннотация:
An approach is described to compute extremely asymmetric X-ray diffraction in multilayers and superlattices taking account of the normal lattice strain. This method is based on the dynamical theory of X-ray diffraction and on a matrix form of boundary conditions, thus providing a simple numerical solution to the problem. The developed approach can be used to interpret extremely asymmetric X-ray diffraction measurements of lattice strains in semiconductor multilayers and in other surface structures.
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