Автор |
J Rodríguez |
Автор |
M Gómez |
Автор |
G A Niklasson |
Автор |
C G Granqvist |
Дата выпуска |
2000-01-07 |
dc.description |
Ti oxide films with varying stoichiometries and different crystal structures were prepared by reactive direct current magnetron sputtering in oxygen-depleted plasmas. The complex dielectric permittivity was determined in the 10<sup>-3</sup> -10<sup>7</sup> Hz range from measurements using a capacitor configuration. The real and imaginary parts of displayed power-law dependences from ~10 Hz up to a value between 1 and 10 kHz. Our data could be rationalized in terms of a model for screened hopping of vacancy-induced charge carriers, but the details remain poorly understood. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
Alternating current characterization of sputter deposited Ti oxide films |
Тип |
paper |
DOI |
10.1088/0022-3727/33/1/304 |
Electronic ISSN |
1361-6463 |
Print ISSN |
0022-3727 |
Журнал |
Journal of Physics D: Applied Physics |
Том |
33 |
Первая страница |
24 |
Последняя страница |
27 |
Аффилиация |
J Rodríguez; Department of Materials Science, The Ångström Laboratory, Uppsala University, PO Box 534, SE-751 21 Uppsala, Sweden |
Аффилиация |
M Gómez; Department of Materials Science, The Ångström Laboratory, Uppsala University, PO Box 534, SE-751 21 Uppsala, Sweden |
Аффилиация |
G A Niklasson; Department of Materials Science, The Ångström Laboratory, Uppsala University, PO Box 534, SE-751 21 Uppsala, Sweden |
Аффилиация |
C G Granqvist; Department of Materials Science, The Ångström Laboratory, Uppsala University, PO Box 534, SE-751 21 Uppsala, Sweden |
Выпуск |
1 |