| Автор | W J A Powell |
| Автор | G W Fynn |
| Дата выпуска | 1969-12-01 |
| dc.description | The ganging of silicon carbide disks for the slow speed multi-cutting of brittle semiconducting dice is described. With twelve 0·125 mm disks and spacing collars as required (e.g. 0·25 or 0·5 mm), one hundred and twenty one dice were produced in two cutting operations with an accuracy to better than 25 μm and minimal chipping. It is concluded that the process could be readily expanded to employ up to fifty disks and a yield of approximately 2400 dice and that the use of silicon carbide disks is suitable economically. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | The slow speed multi-sawing of brittle semiconducting compounds |
| Тип | note |
| DOI | 10.1088/0022-3735/2/12/439 |
| Print ISSN | 0022-3735 |
| Журнал | Journal of Physics E: Scientific Instruments |
| Том | 2 |
| Первая страница | 1122 |
| Последняя страница | 1123 |
| Аффилиация | W J A Powell; Royal Radar Establishment, Malvern, Worcs. |
| Аффилиация | G W Fynn; Royal Radar Establishment, Malvern, Worcs. |
| Выпуск | 12 |
