Variable-size wafer holder for infrared spectrophotometers (impurity concentration measurement)
J A A Engelbrecht; M V Kulkarni; J A A Engelbrecht; IBM East Fishkill, Hopewell Junction, NY, USA; M V Kulkarni; IBM East Fishkill, Hopewell Junction, NY, USA
Журнал:
Journal of Physics E: Scientific Instruments
Дата:
1987-12-01
Аннотация:
A holder was designed to accommodate wafers of varying diameters for the determination of impurity concentrations radially across wafers in single-beam infrared spectrophotometers.
258.6Кб