| Автор | J A A Engelbrecht |
| Автор | M V Kulkarni |
| Дата выпуска | 1987-12-01 |
| dc.description | A holder was designed to accommodate wafers of varying diameters for the determination of impurity concentrations radially across wafers in single-beam infrared spectrophotometers. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Variable-size wafer holder for infrared spectrophotometers (impurity concentration measurement) |
| Тип | paper |
| DOI | 10.1088/0022-3735/20/12/010 |
| Print ISSN | 0022-3735 |
| Журнал | Journal of Physics E: Scientific Instruments |
| Том | 20 |
| Первая страница | 1478 |
| Последняя страница | 1479 |
| Аффилиация | J A A Engelbrecht; IBM East Fishkill, Hopewell Junction, NY, USA |
| Аффилиация | M V Kulkarni; IBM East Fishkill, Hopewell Junction, NY, USA |
| Выпуск | 12 |
