| Автор | R B Marcus |
| Автор | T T Sheng |
| Автор | C J Calbick |
| Дата выпуска | 1972-03-01 |
| dc.description | A high-vacuum specimen chamber was constructed for a Siemens electron microscope in order that in situ studies of the growth of refractory metal films may be performed under clean well-defined conditions. The chamber is differentially pumped and reaches a vacuum of 0.1 mu Torr with the rest of the column at about 20 mu Torr. The hydrocarbon contamination rate at the specimen is approximately 2.5 AA min<sup>-1</sup> compared with about 500 AA min<sup>-1</sup> for the unmodified instrument. The stage operates smoothly, and images at 80000* are steady and free from vibration. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | A high vacuum large volume specimen chamber for an electron microscope |
| Тип | paper |
| DOI | 10.1088/0022-3735/5/3/014 |
| Print ISSN | 0022-3735 |
| Журнал | Journal of Physics E: Scientific Instruments |
| Том | 5 |
| Первая страница | 234 |
| Последняя страница | 236 |
| Аффилиация | R B Marcus; Bell Telephone Labs. Inc., Murray Hill, NJ, USA |
| Аффилиация | T T Sheng; Bell Telephone Labs. Inc., Murray Hill, NJ, USA |
| Аффилиация | C J Calbick; Bell Telephone Labs. Inc., Murray Hill, NJ, USA |
| Выпуск | 3 |
