| Автор | Fred Goesmann |
| Автор | Matthias Mölle |
| Автор | Thomas Studnitzky |
| Автор | Rainer Schmid-Fetzer |
| Дата выпуска | 1998-02-01 |
| dc.description | In this study interfacial reactions and electrical properties of Ti, In, Au and W on ZnSe are presented. The combination of these two aspects of contact formation is very useful for the assessment of contact preparation procedures. Firstly the thermodynamic equilibria in the ternary metal-Zn-Se systems were evaluated. Secondly bulk diffusion experiments on the metals on ZnSe crystals were performed. Thirdly the electrical properties of the metal-p-type ZnSe contacts were evaluated and correlated to the results of the phase equilibrium and diffusion studies. Ti and In form ohmic contacts on p-type ZnSe but the mechanism is different. With Ti an interface reaction occurs; with In a solution of surface contaminations in the liquid metal film seems probable. Au and W are not very useful as electrical contacts. Neither reacts with the semiconductor. Au yields irreproducible electrical properties; W contacts show a very bad adherence to the semiconductor. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Interface reactions and electrical properties of metal contacts (Ti, In, Au, W) on p-ZnSe |
| Тип | paper |
| DOI | 10.1088/0268-1242/13/2/014 |
| Electronic ISSN | 1361-6641 |
| Print ISSN | 0268-1242 |
| Журнал | Semiconductor Science and Technology |
| Том | 13 |
| Первая страница | 236 |
| Последняя страница | 240 |
| Аффилиация | Fred Goesmann; Technische Universität Clausthal, AG Elektronische Materialien, Robert-Koch-Straße 42, D-38678 Clausthal-Zellerfeld, Germany |
| Аффилиация | Matthias Mölle; Technische Universität Clausthal, AG Elektronische Materialien, Robert-Koch-Straße 42, D-38678 Clausthal-Zellerfeld, Germany |
| Аффилиация | Thomas Studnitzky; Technische Universität Clausthal, AG Elektronische Materialien, Robert-Koch-Straße 42, D-38678 Clausthal-Zellerfeld, Germany |
| Аффилиация | Rainer Schmid-Fetzer; Technische Universität Clausthal, AG Elektronische Materialien, Robert-Koch-Straße 42, D-38678 Clausthal-Zellerfeld, Germany |
| Выпуск | 2 |
