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Автор Zhi-Jun Xin
Автор Richard J Peaty
Автор Harvey N Rutt
Автор Robert W Eason
Дата выпуска 1999-08-01
dc.description We report, for the first time, epitaxial growth of high-quality ZnS films on sapphire and silicon substrates, using pulsed laser deposition. X-ray diffraction results show that at all growth temperatures from 200 °C to 680 °C, epitaxial wurtzite (002) ZnS films have been successfully grown on (102) sapphire and (001) silicon substrates. X-ray diffraction data yield full width at half maximum 2 values of 0.13° for as-grown samples, compared with 2 values of 0.09° and 0.08° for the bare sapphire and silicon substrates respectively.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Epitaxial growth of high-quality ZnS films on sapphire and silicon by pulsed laser deposition
Тип paper
DOI 10.1088/0268-1242/14/8/305
Electronic ISSN 1361-6641
Print ISSN 0268-1242
Журнал Semiconductor Science and Technology
Том 14
Первая страница 695
Последняя страница 698
Аффилиация Zhi-Jun Xin; Optoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, UK
Аффилиация Richard J Peaty; Optoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, UK
Аффилиация Harvey N Rutt; Optoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, UK
Аффилиация Robert W Eason; Optoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, UK
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