Two-dimensional model for OBIC studies on misfit dislocations in GaAs-(In,Ga)As heterostructures
P J van der Wel; J te Nijenhuis; L J Giling; P J van der Wel; Res. Inst. for Mater., Nijmegen Univ., Netherlands; J te Nijenhuis; Res. Inst. for Mater., Nijmegen Univ., Netherlands; L J Giling; Res. Inst. for Mater., Nijmegen Univ., Netherlands
Журнал:
Semiconductor Science and Technology
Дата:
1993-03-01
Аннотация:
Misfit dislocations in strained GaAs/(In,Ga)As heterostructures have been studied by high-resolution optical beam induced current (OBIC) imaging. A decrease of the OBIC signal is observed when the focused laser beam crosses a dislocation line. The OBIC contrast is calculated by solving the diffusion equation in a two-dimensional system perpendicular to the misfit dislocation lines. It is shown that the calculated OBIC contrast is in qualitative agreement with the experimental signal when it is assumed that a local increase of recombination rate is present around the dislocation lines.
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