| Автор | G Florence |
| Автор | S Ang |
| Автор | W D Brown |
| Дата выпуска | 1995-07-01 |
| dc.description | Yttria-stabilized zirconia (YSZ) buffer layers have been sputter deposited onto various substrates including silicon and nickel alloy using ion-beam-assisted deposition (IBAD). This technique resulted in the formation of buffer layers which exhibit strong (100) phase growth as well as in-plane orientation as evidenced by X-ray diffraction measurements. Subsequent YBCO depositions on these films exhibit T<sub>c</sub> values of 86 K and strong biaxial texture with the c axis normal to the surface. With further refinement, this technique may be used to fabricate the multilayer substrate structure needed for superconducting multichip modules. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Ion-beam-assisted sputter deposition of YSZ buffer layers for superconducting interconnect applications |
| Тип | paper |
| DOI | 10.1088/0953-2048/8/7/011 |
| Electronic ISSN | 1361-6668 |
| Print ISSN | 0953-2048 |
| Журнал | Superconductor Science and Technology |
| Том | 8 |
| Первая страница | 546 |
| Последняя страница | 551 |
| Аффилиация | G Florence; High Density Electron. Center, Arkansas Univ., Fayetteville, AR, USA |
| Аффилиация | S Ang; High Density Electron. Center, Arkansas Univ., Fayetteville, AR, USA |
| Аффилиация | W D Brown; High Density Electron. Center, Arkansas Univ., Fayetteville, AR, USA |
| Выпуск | 7 |
