Wavy interface morphologies in strained multilayers on vicinal Si(111) substrates
J H Li; Y Yamaguchi; H Hashizume; N Usami; Y Shiraki
Журнал:
Journal of Physics: Condensed Matter
Дата:
1998-10-05
Аннотация:
We report grazing-angle x-ray scattering investigations of interface morphologies in strained multilayers grown on vicinal Si(111) substrates. Samples with different Ge fractions in the alloy layers show a common feature of wavy interfaces arising from the substrate miscut and step bunching. They differ, however, quite remarkably in the wavy period. Our analyses show that the stress-driven step redistribution should take the responsibility for such behaviours of the interfaces.
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