A transport equation model that is consistent with Monte Carlo simulations of ion implantation into infinite targets
R Oven; M D J Bowyer; D G Ashworth; R Oven; Electron. Eng. Lab., Kent Univ., Canterbury, UK; M D J Bowyer; Electron. Eng. Lab., Kent Univ., Canterbury, UK; D G Ashworth; Electron. Eng. Lab., Kent Univ., Canterbury, UK
Журнал:
Journal of Physics: Condensed Matter
Дата:
1993-04-05
Аннотация:
In this paper a transport equation (TE) is derived that matches closely (within the limitation of an infinite target) the transport model in the Monte Carlo code TRIM. Initially, the authors derive a TE that incorporates an arbitrary free-flight path length distribution function and a stopping energy. From this TE a coupled set of integral equations (for spatial moments up to order four) incorporating the liquid free-flight path model used in TRIM is derived. Also, for the gas-like model of the free-flight path length distribution, the equivalence is shown between the new TE and the LSS backward linearized Boltzmann equation extended by Brice to include an intermediate energy.
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