| Автор | R Oven |
| Автор | M D J Bowyer |
| Автор | D G Ashworth |
| Дата выпуска | 1993-04-05 |
| dc.description | In this paper a transport equation (TE) is derived that matches closely (within the limitation of an infinite target) the transport model in the Monte Carlo code TRIM. Initially, the authors derive a TE that incorporates an arbitrary free-flight path length distribution function and a stopping energy. From this TE a coupled set of integral equations (for spatial moments up to order four) incorporating the liquid free-flight path model used in TRIM is derived. Also, for the gas-like model of the free-flight path length distribution, the equivalence is shown between the new TE and the LSS backward linearized Boltzmann equation extended by Brice to include an intermediate energy. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | A transport equation model that is consistent with Monte Carlo simulations of ion implantation into infinite targets |
| Тип | paper |
| DOI | 10.1088/0953-8984/5/14/013 |
| Electronic ISSN | 1361-648X |
| Print ISSN | 0953-8984 |
| Журнал | Journal of Physics: Condensed Matter |
| Том | 5 |
| Первая страница | 2157 |
| Последняя страница | 2170 |
| Аффилиация | R Oven; Electron. Eng. Lab., Kent Univ., Canterbury, UK |
| Аффилиация | M D J Bowyer; Electron. Eng. Lab., Kent Univ., Canterbury, UK |
| Аффилиация | D G Ashworth; Electron. Eng. Lab., Kent Univ., Canterbury, UK |
| Выпуск | 14 |
