Автор |
R Oven |
Автор |
M D J Bowyer |
Автор |
D G Ashworth |
Дата выпуска |
1993-04-05 |
dc.description |
In this paper a transport equation (TE) is derived that matches closely (within the limitation of an infinite target) the transport model in the Monte Carlo code TRIM. Initially, the authors derive a TE that incorporates an arbitrary free-flight path length distribution function and a stopping energy. From this TE a coupled set of integral equations (for spatial moments up to order four) incorporating the liquid free-flight path model used in TRIM is derived. Also, for the gas-like model of the free-flight path length distribution, the equivalence is shown between the new TE and the LSS backward linearized Boltzmann equation extended by Brice to include an intermediate energy. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
A transport equation model that is consistent with Monte Carlo simulations of ion implantation into infinite targets |
Тип |
paper |
DOI |
10.1088/0953-8984/5/14/013 |
Electronic ISSN |
1361-648X |
Print ISSN |
0953-8984 |
Журнал |
Journal of Physics: Condensed Matter |
Том |
5 |
Первая страница |
2157 |
Последняя страница |
2170 |
Аффилиация |
R Oven; Electron. Eng. Lab., Kent Univ., Canterbury, UK |
Аффилиация |
M D J Bowyer; Electron. Eng. Lab., Kent Univ., Canterbury, UK |
Аффилиация |
D G Ashworth; Electron. Eng. Lab., Kent Univ., Canterbury, UK |
Выпуск |
14 |