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Автор R Oven
Автор M D J Bowyer
Автор D G Ashworth
Дата выпуска 1993-04-05
dc.description In this paper a transport equation (TE) is derived that matches closely (within the limitation of an infinite target) the transport model in the Monte Carlo code TRIM. Initially, the authors derive a TE that incorporates an arbitrary free-flight path length distribution function and a stopping energy. From this TE a coupled set of integral equations (for spatial moments up to order four) incorporating the liquid free-flight path model used in TRIM is derived. Also, for the gas-like model of the free-flight path length distribution, the equivalence is shown between the new TE and the LSS backward linearized Boltzmann equation extended by Brice to include an intermediate energy.
Формат application.pdf
Издатель Institute of Physics Publishing
Название A transport equation model that is consistent with Monte Carlo simulations of ion implantation into infinite targets
Тип paper
DOI 10.1088/0953-8984/5/14/013
Electronic ISSN 1361-648X
Print ISSN 0953-8984
Журнал Journal of Physics: Condensed Matter
Том 5
Первая страница 2157
Последняя страница 2170
Аффилиация R Oven; Electron. Eng. Lab., Kent Univ., Canterbury, UK
Аффилиация M D J Bowyer; Electron. Eng. Lab., Kent Univ., Canterbury, UK
Аффилиация D G Ashworth; Electron. Eng. Lab., Kent Univ., Canterbury, UK
Выпуск 14

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