Characteristic quantities of a cascade arc used as a light source for spectroscopic techniques
A T M Wilbers; G M W Kroesen; C J Timmermans; D C Schram; A T M Wilbers; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands; G M W Kroesen; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands; C J Timmermans; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands; D C Schram; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands
Журнал:
Measurement Science and Technology
Дата:
1990-12-01
Аннотация:
The authors have determined the characteristic quantities (the electron temperature and the electron density) of an argon plasma in a cascade arc (diameter of 2 and 4 mm) for a pressure range of 1*10<sup>5</sup>-8*10<sup>5</sup> Pa and a current range of 20-70 A. The absolute continuum intensity was also determined in the wavelength ranges from 250-320 nm and 380-800 nm for pressures of 2, 4 and 6 bar and 20, 40 and 60 A in the case of a 2 mm arc. The plasma is close to local thermal equilibrium (LTE). Using the mentioned quantities, prediction of the absolute intensity as a function of the wavelength is possible from 140 nm to the infrared within 10%. The use of the arc as a light source in photon induced chemical vapour deposition, spectroscopic ellipsometry and infrared absorption spectroscopy is discussed.
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