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Автор A T M Wilbers
Автор G M W Kroesen
Автор C J Timmermans
Автор D C Schram
Дата выпуска 1990-12-01
dc.description The authors have determined the characteristic quantities (the electron temperature and the electron density) of an argon plasma in a cascade arc (diameter of 2 and 4 mm) for a pressure range of 1*10<sup>5</sup>-8*10<sup>5</sup> Pa and a current range of 20-70 A. The absolute continuum intensity was also determined in the wavelength ranges from 250-320 nm and 380-800 nm for pressures of 2, 4 and 6 bar and 20, 40 and 60 A in the case of a 2 mm arc. The plasma is close to local thermal equilibrium (LTE). Using the mentioned quantities, prediction of the absolute intensity as a function of the wavelength is possible from 140 nm to the infrared within 10%. The use of the arc as a light source in photon induced chemical vapour deposition, spectroscopic ellipsometry and infrared absorption spectroscopy is discussed.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Characteristic quantities of a cascade arc used as a light source for spectroscopic techniques
Тип paper
DOI 10.1088/0957-0233/1/12/012
Electronic ISSN 1361-6501
Print ISSN 0957-0233
Журнал Measurement Science and Technology
Том 1
Первая страница 1326
Последняя страница 1332
Аффилиация A T M Wilbers; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands
Аффилиация G M W Kroesen; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands
Аффилиация C J Timmermans; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands
Аффилиация D C Schram; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands
Выпуск 12

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