Автор |
A T M Wilbers |
Автор |
G M W Kroesen |
Автор |
C J Timmermans |
Автор |
D C Schram |
Дата выпуска |
1990-12-01 |
dc.description |
The authors have determined the characteristic quantities (the electron temperature and the electron density) of an argon plasma in a cascade arc (diameter of 2 and 4 mm) for a pressure range of 1*10<sup>5</sup>-8*10<sup>5</sup> Pa and a current range of 20-70 A. The absolute continuum intensity was also determined in the wavelength ranges from 250-320 nm and 380-800 nm for pressures of 2, 4 and 6 bar and 20, 40 and 60 A in the case of a 2 mm arc. The plasma is close to local thermal equilibrium (LTE). Using the mentioned quantities, prediction of the absolute intensity as a function of the wavelength is possible from 140 nm to the infrared within 10%. The use of the arc as a light source in photon induced chemical vapour deposition, spectroscopic ellipsometry and infrared absorption spectroscopy is discussed. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
Characteristic quantities of a cascade arc used as a light source for spectroscopic techniques |
Тип |
paper |
DOI |
10.1088/0957-0233/1/12/012 |
Electronic ISSN |
1361-6501 |
Print ISSN |
0957-0233 |
Журнал |
Measurement Science and Technology |
Том |
1 |
Первая страница |
1326 |
Последняя страница |
1332 |
Аффилиация |
A T M Wilbers; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands |
Аффилиация |
G M W Kroesen; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands |
Аффилиация |
C J Timmermans; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands |
Аффилиация |
D C Schram; Dept. of Phys., Eindhoven Univ. of Technol., Netherlands |
Выпуск |
12 |