A correlation between particle growth and spatiotemporal RF plasma structure
T Kamata; S Kakuta; Y Yamaguchi; T Makabe; T Kamata; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan; S Kakuta; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan; Y Yamaguchi; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan; T Makabe; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan
Журнал:
Plasma Sources Science and Technology
Дата:
1994-08-01
Аннотация:
Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF<sub>2</sub>CF<sub>2</sub>-)<sub>n</sub> and its fragments as an impurity. The space- and time-variation of the radiofrequency plasma structure is mainly studied simultaneously with the particle size and density by both spatiotemporally resolved optical emission spectroscopy and Mie scattering of laser light. A correlation is demonstrated between the particle size/density and the radiofrequency plasma structure.
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