| Автор | T Kamata |
| Автор | S Kakuta |
| Автор | Y Yamaguchi |
| Автор | T Makabe |
| Дата выпуска | 1994-08-01 |
| dc.description | Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF<sub>2</sub>CF<sub>2</sub>-)<sub>n</sub> and its fragments as an impurity. The space- and time-variation of the radiofrequency plasma structure is mainly studied simultaneously with the particle size and density by both spatiotemporally resolved optical emission spectroscopy and Mie scattering of laser light. A correlation is demonstrated between the particle size/density and the radiofrequency plasma structure. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | A correlation between particle growth and spatiotemporal RF plasma structure |
| Тип | paper |
| DOI | 10.1088/0963-0252/3/3/011 |
| Electronic ISSN | 1361-6595 |
| Print ISSN | 0963-0252 |
| Журнал | Plasma Sources Science and Technology |
| Том | 3 |
| Первая страница | 310 |
| Последняя страница | 313 |
| Аффилиация | T Kamata; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan |
| Аффилиация | S Kakuta; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan |
| Аффилиация | Y Yamaguchi; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan |
| Аффилиация | T Makabe; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan |
| Выпуск | 3 |
