| Автор | Chakraborty, B R |
| Автор | Halder, S K |
| Автор | Karar, N |
| Автор | Kabiraj, D |
| Автор | Avasthi, D K |
| Дата выпуска | 2005-08-21 |
| dc.description | A multilayer heterostructure of Si(50 nm)/Co(50 nm)/Si(50 nm)/Si⟨ 100⟩ was prepared by an e-beam evaporation technique under UHV conditions and it was then subjected to irradiation by 120 MeV Au<sup>+</sup> ions with fluence varying between 10<sup>13</sup> and 10<sup>14</sup> ions cm<sup>−2</sup>. No external thermal treatments were used. Secondary ion mass spectrometry was used in the depth profile mode, which indicated a monotonic increase in the mixing width with fluence at the first interface of Si/Co. Depth profile analysis suggested major changes in the preferential sputtering rates of Co at the interface indicating formation of silicides. Further investigation by x-ray diffraction confirmed the formation of different phases of cobalt silicides, Co<sub>2</sub>Si, CoSi and CoSi<sub>2</sub>, as a buried layer, while the Raman spectroscopy showed broad peaks near 325 and 725 cm<sup>−1</sup>, which are characteristic of the CoSi<sub>2</sub> phase. The above work suggests that swift heavy ion irradiation can be advantageously used for interconnect related buried layer silicide formation at room temperature avoiding thermal annealing. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2005 IOP Publishing Ltd |
| Название | Formation of cobalt silicides as a buried layer in silicon using high energy heavy ion irradiation |
| Тип | paper |
| DOI | 10.1088/0022-3727/38/16/015 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 38 |
| Первая страница | 2836 |
| Последняя страница | 2840 |
| Аффилиация | Chakraborty, B R; National Physical Laboratory, Dr K S Krishnan Road, New Delhi, 110012, India; |
| Аффилиация | Halder, S K; National Physical Laboratory, Dr K S Krishnan Road, New Delhi, 110012, India |
| Аффилиация | Karar, N; National Physical Laboratory, Dr K S Krishnan Road, New Delhi, 110012, India |
| Аффилиация | Kabiraj, D; Nuclear Science Centre, Aruna Asaf Ali Road, New Delhi, 110064, India |
| Аффилиация | Avasthi, D K; Nuclear Science Centre, Aruna Asaf Ali Road, New Delhi, 110064, India |
| Выпуск | 16 |
