Absolute measurements of the continuum radiation to determine the electron density in a microwave-induced argon plasma
Iordanova, E; de Vries, N; Guillemier, M; van der Mullen, J J A M; Iordanova, E; Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, The Netherlands; de Vries, N; Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, The Netherlands; Guillemier, M; Université Pierre et Marie Curie, 4, Place Jussieu, 75252 Paris cedex 06, France; van der Mullen, J J A M; Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, The Netherlands
Журнал:
Journal of Physics D: Applied Physics
Дата:
2008-01-07
Аннотация:
A method for the determination of the electron density (n<sub>e</sub>) using the continuum radiation is presented. The radiation is calibrated with a standard tungsten ribbon lamp and thus expressed in absolute units. This method is applied to a microwave-induced argon plasma, created by a surfatron (2.45 GHz), for which the standard settings are: wavelength region at 648 nm, power of 60 W, pressure of 15 mbar, gas flow of 70 sccm and axial distance from the launcher of 3 cm. Due to the low degree of ionization, the influence of electron–ion interactions can be neglected; the radiation is predominantly generated by free–free interactions between electrons and atoms. The method provides the electron density values in the order of 10<sup>19</sup> m<sup>−3</sup> for different plasma settings. It is observed that the measured n<sub>e</sub> follows the well-known trends—it decreases in the direction of the propagating surface wave and increases with power.
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