| Автор | Iordanova, E |
| Автор | de Vries, N |
| Автор | Guillemier, M |
| Автор | van der Mullen, J J A M |
| Дата выпуска | 2008-01-07 |
| dc.description | A method for the determination of the electron density (n<sub>e</sub>) using the continuum radiation is presented. The radiation is calibrated with a standard tungsten ribbon lamp and thus expressed in absolute units. This method is applied to a microwave-induced argon plasma, created by a surfatron (2.45 GHz), for which the standard settings are: wavelength region at 648 nm, power of 60 W, pressure of 15 mbar, gas flow of 70 sccm and axial distance from the launcher of 3 cm. Due to the low degree of ionization, the influence of electron–ion interactions can be neglected; the radiation is predominantly generated by free–free interactions between electrons and atoms. The method provides the electron density values in the order of 10<sup>19</sup> m<sup>−3</sup> for different plasma settings. It is observed that the measured n<sub>e</sub> follows the well-known trends—it decreases in the direction of the propagating surface wave and increases with power. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2008 IOP Publishing Ltd |
| Название | Absolute measurements of the continuum radiation to determine the electron density in a microwave-induced argon plasma |
| Тип | paper |
| DOI | 10.1088/0022-3727/41/1/015208 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 41 |
| Первая страница | 15208 |
| Последняя страница | 15215 |
| Аффилиация | Iordanova, E; Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, The Netherlands |
| Аффилиация | de Vries, N; Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, The Netherlands |
| Аффилиация | Guillemier, M; Université Pierre et Marie Curie, 4, Place Jussieu, 75252 Paris cedex 06, France |
| Аффилиация | van der Mullen, J J A M; Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, The Netherlands |
| Выпуск | 1 |
