Mg<sub>x</sub>Zn<sub>1−x</sub>O solar-blind photodetector grown by radio frequency magnetron sputtering
Jiang, D Y; Shan, C X; Zhang, J Y; Lu, Y M; Yao, B; Zhao, D X; Zhang, Z Z; Shen, D Z; Yang, C L; Jiang, D Y; Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, People's Republic of China; Graduate School of the Chinese Academy of Sciences, Beijing 100049, People's Republic of China; Shan, C X; Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, People's Republic of China; Zhang, J Y; Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, People's Republic of China;; Lu, Y M; Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, People's Republic of China; Yao, B; Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, People's Republic of China; Zhao, D X; Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, People's Republic of China; Zhang, Z Z; Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, People's Republic of China; Shen, D Z; Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, People's Republic of China; Yang, C L; School of Physics and Engineering, Sun Yat Sen University, Guangzhou, People's Republic of China
Журнал:
Journal of Physics D: Applied Physics
Дата:
2009-01-21
Аннотация:
Cubic Mg<sub>x</sub>Zn<sub>1−x</sub>O thin films (x = 0.70) were grown on quartz substrates by radio frequency magnetron sputtering and a metal–semiconductor–metal structured photodetector was fabricated based on the film. The photodetector exhibited a dominant response peak at about 225 nm with a cutoff wavelength at about 230 nm, which lies in the solar-blind spectrum range (220–280 nm). A shoulder also appeared in the response spectrum at about 265 nm besides the dominant peak, which resulted from the phase separation in the Mg<sub>0.70</sub>Zn<sub>0.30</sub>O thin films as revealed by transmission electron microscopy. The photodetector showed very low dark current (2 pA at 3 V bias).
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