Fabrication of self-aligned side gates to carbon nanotubes
L A W Robinson; S-B Lee; K B K Teo; M Chhowalla; G A J Amaratunga; W I Milne; D A Williams; D G Hasko; H Ahmed
Журнал:
Nanotechnology
Дата:
2003-02-01
Аннотация:
We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90.
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