| Автор | L A W Robinson |
| Автор | S-B Lee |
| Автор | K B K Teo |
| Автор | M Chhowalla |
| Автор | G A J Amaratunga |
| Автор | W I Milne |
| Автор | D A Williams |
| Автор | D G Hasko |
| Автор | H Ahmed |
| Дата выпуска | 2003-02-01 |
| dc.description | We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Fabrication of self-aligned side gates to carbon nanotubes |
| Тип | paper |
| DOI | 10.1088/0957-4484/14/2/336 |
| Electronic ISSN | 1361-6528 |
| Print ISSN | 0957-4484 |
| Журнал | Nanotechnology |
| Том | 14 |
| Первая страница | 290 |
| Последняя страница | 293 |
| Выпуск | 2 |
