| Автор | H Y Zhou |
| Автор | R J Zhan |
| Автор | X D Zhu |
| Автор | X H Wen |
| Автор | X Chen |
| Дата выпуска | 2004-11-01 |
| dc.description | Nanocrystalline diamond (NCD) films were deposited using CH<sub>4</sub> and H<sub>2</sub> gas mixtures by the electron assisted chemical vapour deposition (EACVD) method at 640 and 400 °C, and microcrystalline diamond film was simultaneously synthesized at 890 °C. The size of NCD was estimated as about 8–100 nm according to electron micrographs and the full width at half maximum of diamond features of x-ray diffraction spectra. We have investigated the local gas environments where diamond films were deposited using a quadrupole mass spectrometer. It shows that the growth temperature and local gas environment are two important factors influencing diamond grain size. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | IOP Publishing Ltd |
| Название | Change from micrometre to nanometre size for diamond grains by plasma chemical vapour deposition |
| Тип | paper |
| DOI | 10.1088/0957-4484/15/11/040 |
| Electronic ISSN | 1361-6528 |
| Print ISSN | 0957-4484 |
| Журнал | Nanotechnology |
| Том | 15 |
| Первая страница | 1609 |
| Последняя страница | 1612 |
| Аффилиация | H Y Zhou; Department of Modern Physics, University of Science and Technology of China, Hefei, Anhui 230026, People’s Republic of China |
| Аффилиация | R J Zhan; Department of Modern Physics, University of Science and Technology of China, Hefei, Anhui 230026, People’s Republic of China |
| Аффилиация | X D Zhu; Department of Modern Physics, University of Science and Technology of China, Hefei, Anhui 230026, People’s Republic of China |
| Аффилиация | X H Wen; Department of Modern Physics, University of Science and Technology of China, Hefei, Anhui 230026, People’s Republic of China |
| Аффилиация | X Chen; Department of Modern Physics, University of Science and Technology of China, Hefei, Anhui 230026, People’s Republic of China |
| Выпуск | 11 |
