Magnetic nanodot arrays patterned by selective ion etching using block copolymer templates
Dae-Geun Choi; Jong-Ryul Jeong; Ki-Young Kwon; Hee-Tae Jung; Sung-Chul Shin; Seung-Man Yang
Журнал:
Nanotechnology
Дата:
2004-08-01
Аннотация:
In this paper, we report a novel method of fabricating patterned magnetic metal alloy CoCrPt nanodots via selective ion etching using a self-organized array of spherical domains of an ordered block copolymer (PS-b-PMMA) film as a template. Reactive ion etching and Ar<sup>+</sup> ion milling were controlled accurately to avoid excess etching and pattern loss in the etching processes. The nanodot arrays had a dot density as high as approximately 10<sup>11</sup> dots cm<sup>−2</sup>, and the magnetic hysteresis loops showed that the coercivity of the isolated CoCrPt dots made using the self-assembled block copolymer was considerably higher than that of the continuous magnetic film. The present method is applicable to other magnetic metals.
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