| Автор | Dae-Geun Choi |
| Автор | Jong-Ryul Jeong |
| Автор | Ki-Young Kwon |
| Автор | Hee-Tae Jung |
| Автор | Sung-Chul Shin |
| Автор | Seung-Man Yang |
| Дата выпуска | 2004-08-01 |
| dc.description | In this paper, we report a novel method of fabricating patterned magnetic metal alloy CoCrPt nanodots via selective ion etching using a self-organized array of spherical domains of an ordered block copolymer (PS-b-PMMA) film as a template. Reactive ion etching and Ar<sup>+</sup> ion milling were controlled accurately to avoid excess etching and pattern loss in the etching processes. The nanodot arrays had a dot density as high as approximately 10<sup>11</sup> dots cm<sup>−2</sup>, and the magnetic hysteresis loops showed that the coercivity of the isolated CoCrPt dots made using the self-assembled block copolymer was considerably higher than that of the continuous magnetic film. The present method is applicable to other magnetic metals. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | IOP Publishing Ltd |
| Название | Magnetic nanodot arrays patterned by selective ion etching using block copolymer templates |
| Тип | paper |
| DOI | 10.1088/0957-4484/15/8/018 |
| Electronic ISSN | 1361-6528 |
| Print ISSN | 0957-4484 |
| Журнал | Nanotechnology |
| Том | 15 |
| Первая страница | 970 |
| Последняя страница | 974 |
| Выпуск | 8 |
