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Автор Park, Woo Young
Автор Kim, Gun Hwan
Автор Seok, Jun Yeong
Автор Kim, Kyung Min
Автор Song, Seul Ji
Автор Lee, Min Hwan
Автор Hwang, Cheol Seong
Дата выпуска 2010-05-14
dc.description This study examined the properties of Schottky-type diodes composed of Pt/TiO<sub>2</sub>/Ti, where the Pt/TiO<sub>2</sub> and TiO<sub>2</sub>/Ti junctions correspond to the blocking and ohmic contacts, respectively, as the selection device for a resistive switching cross-bar array. An extremely high forward-to-reverse current ratio of ∼ 10<sup>9</sup> was achieved at 1 V when the TiO<sub>2</sub> film thickness was 19 nm. TiO<sub>2</sub> film was grown by atomic layer deposition at a substrate temperature of 250 °C. Conductive atomic force microscopy revealed that the forward current flew locally, which limits the maximum forward current density to < 10 A cm<sup> − 2</sup> for a large electrode (an area of ∼ 60 000 µm<sup>2</sup>). However, the local current measurement showed a local forward current density as high as ∼ 10<sup>5</sup> A cm<sup> − 2</sup>. Therefore, it is expected that this type of Schottky diode effectively suppresses the sneak current without adverse interference effects in a nano-scale resistive switching cross-bar array with high block density.
Формат application.pdf
Издатель Institute of Physics Publishing
Копирайт IOP Publishing Ltd
Название A Pt/TiO<sub>2</sub>/Ti Schottky-type selection diode for alleviating the sneak current in resistance switching memory arrays
Тип paper
DOI 10.1088/0957-4484/21/19/195201
Electronic ISSN 1361-6528
Print ISSN 0957-4484
Журнал Nanotechnology
Том 21
Первая страница 195201
Последняя страница 195204
Аффилиация Park, Woo Young; Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea
Аффилиация Kim, Gun Hwan; Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea
Аффилиация Seok, Jun Yeong; Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea
Аффилиация Kim, Kyung Min; Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea
Аффилиация Song, Seul Ji; Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea
Аффилиация Lee, Min Hwan; Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea
Аффилиация Hwang, Cheol Seong; Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea
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