Fabrication of an inexpensive cleanroom module for microsystem testing
Johnstone, R W; Tsang, S-H; Foulds, I G; Lee, S-W; Sameoto, D; Parameswaran, M; Johnstone, R W; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada; Tsang, S-H; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada; Foulds, I G; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada; Lee, S-W; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada; Sameoto, D; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada; Parameswaran, M; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada
Журнал:
Journal of Micromechanics and Microengineering
Дата:
2007-08-01
Аннотация:
We have built a freestanding cleanroom module for microsystem testing. The environment has an interior floor space of 4.3 m × 2.1 m and a ceiling of 2.4 m (8 feet). The cleanroom module can be operated as a class 10 000 environment, and the cost of materials was less than CDN$1900. In this paper, we describe the construction and testing of our cleanroom module.
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