| Автор | Johnstone, R W |
| Автор | Tsang, S-H |
| Автор | Foulds, I G |
| Автор | Lee, S-W |
| Автор | Sameoto, D |
| Автор | Parameswaran, M |
| Дата выпуска | 2007-08-01 |
| dc.description | We have built a freestanding cleanroom module for microsystem testing. The environment has an interior floor space of 4.3 m × 2.1 m and a ceiling of 2.4 m (8 feet). The cleanroom module can be operated as a class 10 000 environment, and the cost of materials was less than CDN$1900. In this paper, we describe the construction and testing of our cleanroom module. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2007 IOP Publishing Ltd |
| Название | Fabrication of an inexpensive cleanroom module for microsystem testing |
| Тип | note |
| DOI | 10.1088/0960-1317/17/8/N01 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 17 |
| Первая страница | N47 |
| Последняя страница | N51 |
| Последняя страница | 4 |
| Аффилиация | Johnstone, R W; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada |
| Аффилиация | Tsang, S-H; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada |
| Аффилиация | Foulds, I G; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada |
| Аффилиация | Lee, S-W; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada |
| Аффилиация | Sameoto, D; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada |
| Аффилиация | Parameswaran, M; Institute for Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, 8888 University Drive, Burnaby, BC, V5A 1S6, Canada |
| Выпуск | 8 |
