An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technologyThis work was presented in part at the 19th MicroMechanics Europe Workshop (MME), 28–30 September 2008, Aachen, Germany.
Sarajlic, Edin; Yamahata, Christophe; Cordero, Mauricio; Fujita, Hiroyuki; Sarajlic, Edin; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan;; Yamahata, Christophe; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan;; Cordero, Mauricio; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan; Fujita, Hiroyuki; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan
Журнал:
Journal of Micromechanics and Microengineering
Дата:
2009-07-01
Аннотация:
We present the design, microfabrication and characterization of an electrostatic 3-phase linear stepper micromotor constructed with vertical trench isolation technology. This suitable technology was used to create a monolithic stepper motor with high-aspect-ratio poles and an integrated 3-phase electrical network in the bulk of a standard single-crystal silicon wafer. The shuttle of the stepper motor is suspended by a flexure to avoid any mechanical contact during operation, enhancing the precision, repeatability and reliability of the stepping motion. The prototype is capable of a maximum travel of +/−26 µm (52 µm) at an actuation voltage of 30 V and a step size of 1.4 µm during a half-stepping sequence.
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