| Автор | Sarajlic, Edin |
| Автор | Yamahata, Christophe |
| Автор | Cordero, Mauricio |
| Автор | Fujita, Hiroyuki |
| Дата выпуска | 2009-07-01 |
| dc.description | We present the design, microfabrication and characterization of an electrostatic 3-phase linear stepper micromotor constructed with vertical trench isolation technology. This suitable technology was used to create a monolithic stepper motor with high-aspect-ratio poles and an integrated 3-phase electrical network in the bulk of a standard single-crystal silicon wafer. The shuttle of the stepper motor is suspended by a flexure to avoid any mechanical contact during operation, enhancing the precision, repeatability and reliability of the stepping motion. The prototype is capable of a maximum travel of +/−26 µm (52 µm) at an actuation voltage of 30 V and a step size of 1.4 µm during a half-stepping sequence. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2009 IOP Publishing Ltd |
| Название | An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technologyThis work was presented in part at the 19th MicroMechanics Europe Workshop (MME), 28–30 September 2008, Aachen, Germany. |
| Тип | paper |
| DOI | 10.1088/0960-1317/19/7/074001 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 19 |
| Первая страница | 74001 |
| Последняя страница | 74007 |
| Аффилиация | Sarajlic, Edin; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan; |
| Аффилиация | Yamahata, Christophe; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan; |
| Аффилиация | Cordero, Mauricio; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan |
| Аффилиация | Fujita, Hiroyuki; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan |
| Выпуск | 7 |
