| Автор | A de Graaf |
| Автор | E Aldea |
| Автор | G Dinescu |
| Автор | M C M van de Sanden |
| Дата выпуска | 2001-08-01 |
| dc.description | The chemistry of an argon/nitrogen thermal plasma expanding through a graphite nozzle is investigated in order to unravel the role of plasma species in the deposition (1-3 nm s<sup>-1</sup> rate) of non-hydrogenated amorphous carbon nitride (a-C:N) films. The spectral emission of plasma species is studied and is used in combination with mass spectrometry and nozzle temperature measurements to distinguish possible mechanisms of species production and excitation. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Investigation of processes in low-pressure expanding thermal plasmas used for carbon nitride deposition: II. Ar/N<sub>2</sub> plasma with graphite nozzle |
| Тип | paper |
| DOI | 10.1088/0963-0252/10/3/317 |
| Electronic ISSN | 1361-6595 |
| Print ISSN | 0963-0252 |
| Журнал | Plasma Sources Science and Technology |
| Том | 10 |
| Первая страница | 524 |
| Последняя страница | 529 |
| Выпуск | 3 |
