3D heterostructures and systems for novel MEMS/NEMS
Yakovlevich Prinz, Victor; Alexandrovich Seleznev, Vladimir; Victorovich Prinz, Alexander; Vladimirovich Kopylov, Alexander; Yakovlevich Prinz, Victor; Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia; Alexandrovich Seleznev, Vladimir; Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia; Victorovich Prinz, Alexander; Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia; Vladimirovich Kopylov, Alexander; Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia
Журнал:
Science and Technology of Advanced Materials
Дата:
2009-06-01
Аннотация:
In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties.
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