| Автор | Yakovlevich Prinz, Victor |
| Автор | Alexandrovich Seleznev, Vladimir |
| Автор | Victorovich Prinz, Alexander |
| Автор | Vladimirovich Kopylov, Alexander |
| Дата выпуска | 2009-06-01 |
| dc.description | In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2009 National Institute for Materials Science |
| Название | 3D heterostructures and systems for novel MEMS/NEMS |
| Тип | rev |
| DOI | 10.1088/1468-6996/10/3/034502 |
| Electronic ISSN | 1878-5514 |
| Print ISSN | 1468-6996 |
| Журнал | Science and Technology of Advanced Materials |
| Том | 10 |
| Первая страница | 34502 |
| Последняя страница | 34510 |
| Аффилиация | Yakovlevich Prinz, Victor; Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia |
| Аффилиация | Alexandrovich Seleznev, Vladimir; Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia |
| Аффилиация | Victorovich Prinz, Alexander; Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia |
| Аффилиация | Vladimirovich Kopylov, Alexander; Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia |
| Выпуск | 3 |
