A 3D tomographic EBSD analysis of a CVD diamond thin film
Liu, Tao; Raabe, Dierk; Zaefferer, Stefan; Liu, Tao; Max-Planck-Institut für Eisenforschung, Abteilung Mikrostrukturphysik und Umformtechnik, Max-Planck-Strasse 1, 40237 Düsseldorf, Germany; Raabe, Dierk; Max-Planck-Institut für Eisenforschung, Abteilung Mikrostrukturphysik und Umformtechnik, Max-Planck-Strasse 1, 40237 Düsseldorf, Germany; Zaefferer, Stefan; Max-Planck-Institut für Eisenforschung, Abteilung Mikrostrukturphysik und Umformtechnik, Max-Planck-Strasse 1, 40237 Düsseldorf, Germany
Журнал:
Science and Technology of Advanced Materials
Дата:
2008-09-01
Аннотация:
We have studied the nucleation and growth processes in a chemical vapor deposition (CVD) diamond film using a tomographic electron backscattering diffraction method (3D EBSD). The approach is based on the combination of a focused ion beam (FIB) unit for serial sectioning in conjunction with high-resolution EBSD. Individual diamond grains were investigated in 3-dimensions particularly with regard to the role of twinning.
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