| Автор | S C H Thian |
| Автор | W Feng |
| Автор | Y S Wong |
| Автор | J Y H Fuh |
| Автор | H T Loh |
| Автор | K H Tee |
| Автор | Y Tang |
| Автор | L Lu |
| Дата выпуска | 2007-07-01 |
| dc.description | Dimensional metrology for micro/nano structure is crucial for addressing quality issues and understanding the performance of micro-fabricated products and micro-fabrication processes. Most of the established methods are based on optical microscopy for planar dimensions and stylus profilometry for out-of-plane dimensions. Contact profilers suffer from slow speed of measurement for three-dimensional profiles and are not suitable for delicate surfaces and parts. Advanced systems using white light interferometer are equipped with CCD cameras and interfaced with a microscope to conduct an array of measurements ranging from two-dimensional to three-dimensional profiles and surface roughness analysis. This paper presents a methodology based on white light interferometer for the dimensional measurement of 3D micro-structures, demonstrated on micro-gears and moulds produced by UV lithography and vacuum casting, respectively. Physical artifacts, such as gauge blocks, are also utilized to verify and validate the measurements on the microcomponents. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | © 2007 IOP Publishing Ltd |
| Название | Dimensional measurement of 3D microstruture based on white light interferometer |
| Тип | paper |
| DOI | 10.1088/1742-6596/48/1/265 |
| Electronic ISSN | 1742-6596 |
| Print ISSN | 1742-6588 |
| Журнал | Journal of Physics: Conference Series |
| Том | 48 |
| Первая страница | 1435 |
| Последняя страница | 1446 |
| Аффилиация | S C H Thian; Mechanical Engineering Department, National University of Singapore, 9 Engineering Drive 1, Singapore 117576 |
| Аффилиация | W Feng; Mechanical Engineering Department, National University of Singapore, 9 Engineering Drive 1, Singapore 117576 |
| Аффилиация | Y S Wong; Mechanical Engineering Department, National University of Singapore, 9 Engineering Drive 1, Singapore 117576 |
| Аффилиация | J Y H Fuh; Mechanical Engineering Department, National University of Singapore, 9 Engineering Drive 1, Singapore 117576 |
| Аффилиация | H T Loh; Mechanical Engineering Department, National University of Singapore, 9 Engineering Drive 1, Singapore 117576 |
| Аффилиация | K H Tee; Mechanical Engineering Department, National University of Singapore, 9 Engineering Drive 1, Singapore 117576 |
| Аффилиация | Y Tang; Mechanical Engineering Department, National University of Singapore, 9 Engineering Drive 1, Singapore 117576 |
| Аффилиация | L Lu; Mechanical Engineering Department, National University of Singapore, 9 Engineering Drive 1, Singapore 117576 |
| Выпуск | 1 |
