Instrumentation for X-ray reflectivity in micro area: present status and future outlook
Kenji Sakurai; Mari Mizusawa; Masashi Ishii; Shun-ichi Kobayashi; Yasuhiko Imai
Журнал:
Journal of Physics: Conference Series
Дата:
2007-10-01
Аннотация:
X-ray reflectivity is sensitive to slight structural changes along the depth of layered materials in the order of sub-nanometers or even smaller. This property is extremely promising for the observation of buried interfaces, but the conventional X-ray reflectivity technique unfortunately lacks spatial resolution. The method looks at quite a large area, typically mm<sup>2</sup>∼ cm<sup>2</sup>of the sample, and this often makes it difficult to analyze realistic problems in modern nano sciences and technologies. The present article discusses instrumentation for upgrading the X-ray reflectivity technique to give it a much higher spatial resolution. Recent preliminary results with high-energy white X-rays are reported.
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