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Автор Kenji Sakurai
Автор Mari Mizusawa
Автор Masashi Ishii
Автор Shun-ichi Kobayashi
Автор Yasuhiko Imai
Дата выпуска 2007-10-01
dc.description X-ray reflectivity is sensitive to slight structural changes along the depth of layered materials in the order of sub-nanometers or even smaller. This property is extremely promising for the observation of buried interfaces, but the conventional X-ray reflectivity technique unfortunately lacks spatial resolution. The method looks at quite a large area, typically mm<sup>2</sup>∼ cm<sup>2</sup>of the sample, and this often makes it difficult to analyze realistic problems in modern nano sciences and technologies. The present article discusses instrumentation for upgrading the X-ray reflectivity technique to give it a much higher spatial resolution. Recent preliminary results with high-energy white X-rays are reported.
Формат application.pdf
Издатель Institute of Physics Publishing
Копирайт © 2007 IOP Publishing Ltd
Название Instrumentation for X-ray reflectivity in micro area: present status and future outlook
Тип paper
DOI 10.1088/1742-6596/83/1/012001
Electronic ISSN 1742-6596
Print ISSN 1742-6588
Журнал Journal of Physics: Conference Series
Том 83
Первая страница 12001
Последняя страница 12007
Выпуск 1

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