Автор |
Kenji Sakurai |
Автор |
Mari Mizusawa |
Автор |
Masashi Ishii |
Автор |
Shun-ichi Kobayashi |
Автор |
Yasuhiko Imai |
Дата выпуска |
2007-10-01 |
dc.description |
X-ray reflectivity is sensitive to slight structural changes along the depth of layered materials in the order of sub-nanometers or even smaller. This property is extremely promising for the observation of buried interfaces, but the conventional X-ray reflectivity technique unfortunately lacks spatial resolution. The method looks at quite a large area, typically mm<sup>2</sup>∼ cm<sup>2</sup>of the sample, and this often makes it difficult to analyze realistic problems in modern nano sciences and technologies. The present article discusses instrumentation for upgrading the X-ray reflectivity technique to give it a much higher spatial resolution. Recent preliminary results with high-energy white X-rays are reported. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Копирайт |
© 2007 IOP Publishing Ltd |
Название |
Instrumentation for X-ray reflectivity in micro area: present status and future outlook |
Тип |
paper |
DOI |
10.1088/1742-6596/83/1/012001 |
Electronic ISSN |
1742-6596 |
Print ISSN |
1742-6588 |
Журнал |
Journal of Physics: Conference Series |
Том |
83 |
Первая страница |
12001 |
Последняя страница |
12007 |
Выпуск |
1 |