Fabrication of robust superconducting granular aluminium/palladium bilayer microbolometers with sub-nanosecond response
T E Wilson; T E Wilson; Department of Physics, Marshall University, One John Marshall Drive, Huntington, WV 25755-2570 USA
Журнал:
Journal of Physics: Conference Series
Дата:
2007-12-01
Аннотация:
We provide a convenient recipe for fabricating reliable superconducting microbolometers as acoustic phonon detectors with sub-nanosecond response, using image-reversal optical lithography and dc-magnetron sputtering, and our recipe requires no chemical or plasma etching. Our approach solves the traditional problem for granular aluminium bolometers of unreliable (i.e., non-Ohmic) electrical contacts by sequentially sputtering the granular aluminium film and then a palladium capping layer. We use dc calibration data, the method of Danilchenko et al. [1], and direct nanosecond-pulsed photoexcitation to obtain the microbolometer's characteristic current, thermal conductance, characteristic relaxation time, and heat capacity. We also demonstrate the use of the deconvolution algorithm of Edwards et al. [2] to obtain the phonon flux in a heat pulse experiment with nanosecond resolution.
576.6Кб