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Автор T E Wilson
Дата выпуска 2007-12-01
dc.description We provide a convenient recipe for fabricating reliable superconducting microbolometers as acoustic phonon detectors with sub-nanosecond response, using image-reversal optical lithography and dc-magnetron sputtering, and our recipe requires no chemical or plasma etching. Our approach solves the traditional problem for granular aluminium bolometers of unreliable (i.e., non-Ohmic) electrical contacts by sequentially sputtering the granular aluminium film and then a palladium capping layer. We use dc calibration data, the method of Danilchenko et al. [1], and direct nanosecond-pulsed photoexcitation to obtain the microbolometer's characteristic current, thermal conductance, characteristic relaxation time, and heat capacity. We also demonstrate the use of the deconvolution algorithm of Edwards et al. [2] to obtain the phonon flux in a heat pulse experiment with nanosecond resolution.
Формат application.pdf
Издатель Institute of Physics Publishing
Копирайт © 2007 IOP Publishing Ltd
Название Fabrication of robust superconducting granular aluminium/palladium bilayer microbolometers with sub-nanosecond response
Тип paper
DOI 10.1088/1742-6596/92/1/012180
Electronic ISSN 1742-6596
Print ISSN 1742-6588
Журнал Journal of Physics: Conference Series
Том 92
Первая страница 12180
Последняя страница 12183
Аффилиация T E Wilson; Department of Physics, Marshall University, One John Marshall Drive, Huntington, WV 25755-2570 USA
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